Yu-Ting Ling

Yu-Ting Ling's picture

Contact

Dr.
Yu-Ting
Ling
Email: 
Yu-Ting.Ling@uantwerpen.be
Fax: 
+32 (0) 3 265 22 45

Research

• Atom Probe Tomography(APT) Modeling:
- Evaporation behaviors with/without Laser illumination
- Reconstruction methods for symmetric/asymmetric tip evolutions

• TCAD Process Modeling for Semiconductor Devices:
- Dopant(P, As, B) diffusion & activation/deactivation modeling in Si, Ge and SiGe
- P and N, P co-diffusion in Ge by kinetic Monte Carlo(kMC) simulations
- Damages and defects evolution after cryo-, RT & hot- implantations
- Plasma doping(PLAD)
- Si-Ge inter-diffusion