@inproceedings {1499, title = {3D imaging of semiconductor components by discrete laminography}, booktitle = {Stress induced phenomena and reliability in 3D microelectronics: AIP Conference Proceedings}, volume = {1601}, year = {2014}, pages = {168-179}, doi = { http://dx.doi.org/10.1063/1.4881350}, author = {Kees Joost Batenburg and Willem Jan Palenstijn and Jan Sijbers} }