@article {pjedrasijgarciabdboeckdvandyck1998, title = {Optimal filtering versus regularization methods in the Fourier precompensation based proximity neurocorrection in electron beam lithography}, journal = {Microelectronic Engineering}, volume = {41}, year = {1998}, pages = {195-198}, author = {P. Jedrasik and J. Garcia and Bart De Boeck and Dirk Van Dyck} }