Optimal filtering versus regularization methods in the Fourier precompensation based proximity neurocorrection in electron beam lithography

TitleOptimal filtering versus regularization methods in the Fourier precompensation based proximity neurocorrection in electron beam lithography
Publication TypeJournal Article
Year of Publication1998
AuthorsJedrasik, P., J. Garcia, B. De Boeck, and D. Van Dyck
JournalMicroelectronic Engineering
Volume41
Pagination195-198